A novel planar, folded-piezo, flexure scan design allows simultaneous lateral and axial sample scanning as well as providing coarse inertial positioning.

The ultra thin package and open optical axis permits the scanner to be incorporated into systems where conventional scan stages are too bulky. This unique device, developed for Nanonics' near-field scanning optical microscope, is now available as a standalone addition to all scanning applications. 

• The Nanonics 3D Flatscanner™

• An ultra thin 7mm piezo-electric scanning stage

• Large scan range up to 70um in the XY plane

• Z-scanning over 70um

• Completely free optical axis

• Access to the sample from above and below
  
  

A breakthrough in piezo-electric scanning technology

Place the Nanonics 3D Flatscanner™ on the stage of any optical microscope and enhance your microscope by providing super-resolution x, y, and z movement of the sample by up to 70 microns. The ultrafine, large extension z movement of the 3D Flatscanner allows one to perform optical sectioning with any lens of the microscope and without moving any critical optical components. This latter capability is especially important for 3-D imaging techniques such as confocal and CCD-based optical sectioning, 4 Pi and non-linear far-field optical imaging. The singular combination of 3-dimensional scanning in an ultrathin, simply controlled device with a clear central aperture makes this scanner the ideal solution for optical tweezers applications.

In scanned probe microscopy applications, including near-field scanning optical microscopy, the large central aperture and the minimal stage height of 7 mm allow for easy access with high powered microscope objectives from either above or below the scanning stage.

Furthermore the large vertical (axial) displacement of up to 70 microns simplifies approaching a sample and allows tracking of structures with very large topographical features.

In addition, the 3D Flatscanner can electronically scan your sample by many millimeters in both x and y with 1 micron resolution to find the region of interest of your sample, while providing fine electronic movement over a range of 70 microns with sub-nanometer resolution. Nanometer resolution position sensors can also be provided. Such sensors furnish appropriate signals for scan correction and/or high-resolution monitoring of the scanner position as a function of applied voltage.
The scanner is available in three versions:
NIS-70: A high-resolution scanning system (<1 nm z noise) with extended scan range and inertial motion capabilities
NIS-30: A super high-resolution scanning system (<1 nm z noise) which has nanometer resolution and the coarse inertial motion capabilities that are a part of all of our stages
NIS-10: An ultra high-resolution system (<0.1 nm z noise) which provides atomic resolution without sacrificing any of the inertial motion capabilities of the system 
Additional features include:
Computer-driven electronics package
Symmetric design minimizes piezo hysteresis
Optional magnetic sample mounting
Optional embedded optical sensors 
 

Closed Loop Option With the inclusion of embedded closed loop sensors, The Nanonics 3D Flat Scanner can return the sample (or tip during tip scanning) to a precise spot with an accuracy of 20 nm. This is unaffected by hysteresis, creep, non-linearity or aging of the piezoceramic. Therefore The Nanonics 3D Flat Scanner with closed loop sensors can perform linearization of the scanner both on-line and off-line during a scan. With the addition of a third z-axis sensor The Nanonics 3D Flat Scanner can perform strictly horizontal movement of the scanner. This can be essential in particular in confocal imaging or when working with certain liquid samples.

Specifications Length/width 70x70 mm Height 7.4 mm Weight 150 g Drive voltage +/- 125 V Scan range (Lateral) 70 µm (NIS-70) 30 µm (NIS-30) 10 µm (NIS-10) Scan range (Axial) 70 µm (NIS-70) 30 µm (NIS-30) 10 µm (NIS-10) Inertial translation range 6 mm Positioning accuracy Sub-nanometer Maximum load 75 g Resonance frequency ~760 Hz (NIS-70) ~400 Hz (NIS-30) ~280 Hz (NIS-10) Central opening 24 mm